• DocumentCode
    447902
  • Title

    Extremely thin, single-crystal films of LiNbO3 fabricated using localized He+ ion-implantation

  • Author

    Djukic, D. ; Izuhara, T. ; Roth, R.M. ; Osgood, R.M., Jr. ; Bakhru, S. ; Bakhru, H.

  • Author_Institution
    Microelectron. Sci. Lab., Columbia Univ., New York, NY, USA
  • Volume
    1
  • fYear
    2005
  • fDate
    22-27 May 2005
  • Firstpage
    229
  • Abstract
    We demonstrate that extremely thin, i.e., ∼2-3μm, single-crystal films of LiNbO3 can be formed on a wafer using patterned ion-implantation followed by chemical etching. Control of the membrane thickness and its waveguiding properties are demonstrated.
  • Keywords
    etching; integrated optics; ion implantation; optical fabrication; optical films; optical materials; optical waveguides; LiNbO3; chemical etching; membrane thickness; patterned ion-implantation; single-crystal film; waveguiding property; Biomembranes; Chemicals; Crystalline materials; Etching; Ferroelectric materials; Helium; Optical devices; Optical films; Optical materials; Resists;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2005. (CLEO). Conference on
  • Print_ISBN
    1-55752-795-4
  • Type

    conf

  • DOI
    10.1109/CLEO.2005.201735
  • Filename
    1572801
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=447902