Title :
Extremely thin, single-crystal films of LiNbO3 fabricated using localized He+ ion-implantation
Author :
Djukic, D. ; Izuhara, T. ; Roth, R.M. ; Osgood, R.M., Jr. ; Bakhru, S. ; Bakhru, H.
Author_Institution :
Microelectron. Sci. Lab., Columbia Univ., New York, NY, USA
Abstract :
We demonstrate that extremely thin, i.e., ∼2-3μm, single-crystal films of LiNbO3 can be formed on a wafer using patterned ion-implantation followed by chemical etching. Control of the membrane thickness and its waveguiding properties are demonstrated.
Keywords :
etching; integrated optics; ion implantation; optical fabrication; optical films; optical materials; optical waveguides; LiNbO3; chemical etching; membrane thickness; patterned ion-implantation; single-crystal film; waveguiding property; Biomembranes; Chemicals; Crystalline materials; Etching; Ferroelectric materials; Helium; Optical devices; Optical films; Optical materials; Resists;
Conference_Titel :
Lasers and Electro-Optics, 2005. (CLEO). Conference on
Print_ISBN :
1-55752-795-4
DOI :
10.1109/CLEO.2005.201735
