Title :
Silicon double inversion of polymeric templates: a new route towards three-dimensional photonic bandgap materials
Author :
Von Freymann, Georg ; Tétreault, Nicolas ; Ozin, Geoffrey A. ; John, Sajeev ; Perez-Willard, Fabian ; Deubel, Markus ; Wegener, Martin
Author_Institution :
Dept. of Chem., Toronto Univ., Ont., Canada
Abstract :
We present the successful silicon double inversion of direct laser written polymer templates for three-dimensional (3D) photonic crystals. Combined with plasma pre-treatment it allows for the fabrication of 3D photonic bandgap materials for telecommunication wavelengths.
Keywords :
laser materials processing; optical materials; optical polymers; photonic crystals; plasma materials processing; 3D photonic bandgap material fabrication; direct laser writing; plasma pre-treatment; polymeric template; silicon double inversion; telecommunication wavelength; three-dimensional photonic bandgap material; Optical device fabrication; Optical materials; Personal communication networks; Photonic band gap; Photonic crystals; Polymers; Resists; Semiconductor lasers; Semiconductor materials; Silicon compounds;
Conference_Titel :
Lasers and Electro-Optics, 2005. (CLEO). Conference on
Print_ISBN :
1-55752-795-4
DOI :
10.1109/CLEO.2005.202005
