• DocumentCode
    452206
  • Title

    Low-Loss, Polarization-Independent Silicon-Oxynitride Waveguides for High-Density Integrated Planar Lightwave Circuits

  • Author

    Shimoda, Tsuyoshi ; Suzuki, Kouichi ; Takaesu, Sekizen ; Furukawa, Akio

  • Author_Institution
    Networking Res. Labs., NEC Corp., Ibaraki
  • Volume
    2
  • fYear
    2002
  • fDate
    8-12 Sept. 2002
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    High-Delta silicon-oxynitride waveguides with low loss of 0.04 dB/cm and low polarization-dependence have been developed. A compact 40-channel AWG with a low insertion-loss of 2.5 dB has been demonstrated with these waveguides and spot-size converters
  • Keywords
    arrayed waveguide gratings; integrated optics; light polarisation; optical losses; silicon compounds; 2.5 dB; SiON; arrayed waveguide grating; high-density planar lightwave circuits; insertion loss; integrated planar lightwave circuits; low-loss waveguides; polarization-dependence; polarization-independent waveguides; silicon-oxynitride waveguides; spot-size converters;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Communication, 2002. ECOC 2002. 28th European Conference on
  • Conference_Location
    Copenhagen
  • Print_ISBN
    87-90974-63-8
  • Type

    conf

  • Filename
    1600996
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=452206