Title :
3D Hollow Waveguides for Micromachined Tunable Photonic Devices
Author :
Miura, Toru ; Koyama, Fumio
Author_Institution :
Tokyo Inst. of Technol., Yokohama
Abstract :
We demonstrate a three dimensional (3D) hollow waveguide with a lateral confinement caused by a step in an etched groove. Low propagation loss is predicted with a help of multilayer coating. We propose novel micromachined tunable waveguide devices based on the hollow optical waveguide
Keywords :
micromachining; micromechanical devices; optical fabrication; optical losses; optical multilayers; optical tuning; optical waveguides; etching; hollow waveguides; micromachining; multilayer coating; propagation loss; tunable photonic devices;
Conference_Titel :
Optical Communication, 2002. ECOC 2002. 28th European Conference on
Conference_Location :
Copenhagen
Print_ISBN :
87-90974-63-8
