Title :
Photonic Crystal Waveguides in SOI fabricated with deep UV lithography
Author :
Bogaerts, Wim ; Wiaux, Vincent ; Taillaert, Dirk ; Beckx, Stephan ; Baets, Roel
Author_Institution :
Dept. of Inf. Technol., Ghent Univ., Gent
Abstract :
We demonstrate photonic crystals for 1550 nm wavelengths fabricated with 248 nm-excimer laser deep UV lithography in silicon-on-insulator, combining high resolution with mass-manufacturing. The structures are of high quality. Measurements show transmission through waveguides and sharp bends
Keywords :
integrated optics; optical fabrication; optical waveguides; photonic crystals; silicon-on-insulator; ultraviolet lithography; 1550 nm; 248 nm; SOI fabrication; Si-SiO2; deep UV lithography; excimer laser lithography; mass-manufacturing; photonic crystal waveguides; photonic crystals; sharp bends; silicon-on-insulator; waveguide transmission;
Conference_Titel :
Optical Communication, 2002. ECOC 2002. 28th European Conference on
Conference_Location :
Copenhagen
Print_ISBN :
87-90974-63-8
