Title :
Transmission-Width-Tunable Silicon-Photonic Microelectromechanical Ring Resonator
Author :
Ordu, Mustafa ; Hane, Kazuhiro
Author_Institution :
Dept. of Nanomech., Tohoku Univ., Sendai, Japan
Abstract :
A microring resonator with a transmission-width (Q-factor) tuning mechanism is proposed. The proposed resonator is composed of freestanding 320-nm-wide 340-nm-thick silicon waveguides, two waveguide couplers, and a 30- μm-wide 40- μm-long comb-drive actuator. The transmission width of the microring is tunable by varying the coupling rate of the couplers with the actuator. The transmission width was varied from 1.42 to 1.61 nm (Q-factor from 1100 to 970) by changing the actuator voltages from 9 to 11 V.
Keywords :
Q-factor; elemental semiconductors; micro-optomechanical devices; microactuators; micromechanical resonators; optical communication equipment; optical couplers; optical resonators; optical tuning; optical waveguides; silicon; Q-factor; Si; comb-drive actuator; microring resonator; silicon waveguides; size 30 mum; size 340 nm; size 40 mum; transmission width tuning; voltage 9 V to 11 V; waveguide couplers; wavelength 1.42 nm to 1.61 nm; Actuators; Couplers; Couplings; Optical resonators; Optical waveguides; Q-factor; Silicon; Microring resonator; Si photonics; microelectromechanical systems; waveguide coupler;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2013.2285130
