Transmission-Width-Tunable Silicon-Photonic Microelectromechanical Ring Resonator

Author

Ordu, Mustafa ; Hane, Kazuhiro

Author_Institution

Dept. of Nanomech., Tohoku Univ., Sendai, Japan

Volume

25

Issue

22

fYear

2013

fDate

Nov.15, 2013

Firstpage

2236

Lastpage

2238

Abstract

A microring resonator with a transmission-width (Q-factor) tuning mechanism is proposed. The proposed resonator is composed of freestanding 320-nm-wide 340-nm-thick silicon waveguides, two waveguide couplers, and a 30- μm-wide 40- μm-long comb-drive actuator. The transmission width of the microring is tunable by varying the coupling rate of the couplers with the actuator. The transmission width was varied from 1.42 to 1.61 nm (Q-factor from 1100 to 970) by changing the actuator voltages from 9 to 11 V.

Keywords

Q-factor; elemental semiconductors; micro-optomechanical devices; microactuators; micromechanical resonators; optical communication equipment; optical couplers; optical resonators; optical tuning; optical waveguides; silicon; Q-factor; Si; comb-drive actuator; microring resonator; silicon waveguides; size 30 mum; size 340 nm; size 40 mum; transmission width tuning; voltage 9 V to 11 V; waveguide couplers; wavelength 1.42 nm to 1.61 nm; Actuators; Couplers; Couplings; Optical resonators; Optical waveguides; Q-factor; Silicon; Microring resonator; Si photonics; microelectromechanical systems; waveguide coupler;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2013.2285130

Filename

6626572