DocumentCode :
452612
Title :
Shear mode A1N thin film electroacoustic resonator for biosensor applications
Author :
Wingqvist, G. ; Bjurström, J. ; Katardjiev, I.
Volume :
1
fYear :
2005
fDate :
18-21 Sept. 2005
Firstpage :
50
Lastpage :
53
Keywords :
Acoustic waves; Biosensors; Fabrication; Film bulk acoustic resonators; Piezoelectric films; Resonant frequency; Sputtering; Substrates; Surface acoustic waves; Transistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 2005 IEEE
ISSN :
1051-0117
Print_ISBN :
0-7803-9382-1
Type :
conf
DOI :
10.1109/ULTSYM.2005.1602793
Filename :
1602793
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=452612
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