Title :
Above-IC FBAR technology for WCDMA and WLAN applications
Author :
Dubois, Marc-Alexandre ; Billard, Christophe ; Carpentier, Jean-François ; Vincent, Pierre ; Parat, Guy ; Muller, Claude
Keywords :
Acoustic waves; BiCMOS integrated circuits; Fabrication; Film bulk acoustic resonators; Integrated circuit technology; Multiaccess communication; Piezoelectric devices; Radio frequency; Resonator filters; Wireless LAN;
Conference_Titel :
Ultrasonics Symposium, 2005 IEEE
Print_ISBN :
0-7803-9382-1
DOI :
10.1109/ULTSYM.2005.1602802