DocumentCode
452639
Title
C-axis inclined ZnO films deposited by reactive sputtering using an additional blind for shear BAW devices
Author
Link, M. ; Schreiter, M. ; Weber, J. ; Pitzer, D. ; Primig, R. ; Assouar, M.B. ; Elmazria, O.
Volume
1
fYear
2005
fDate
18-21 Sept. 2005
Firstpage
202
Lastpage
205
Keywords
Acoustic waves; Argon; Biosensors; Bulk acoustic wave devices; Film bulk acoustic resonators; Piezoelectric films; Sputtering; Substrates; Surface acoustic waves; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 2005 IEEE
ISSN
1051-0117
Print_ISBN
0-7803-9382-1
Type
conf
DOI
10.1109/ULTSYM.2005.1602831
Filename
1602831
Link To Document