DocumentCode :
452639
Title :
C-axis inclined ZnO films deposited by reactive sputtering using an additional blind for shear BAW devices
Author :
Link, M. ; Schreiter, M. ; Weber, J. ; Pitzer, D. ; Primig, R. ; Assouar, M.B. ; Elmazria, O.
Volume :
1
fYear :
2005
fDate :
18-21 Sept. 2005
Firstpage :
202
Lastpage :
205
Keywords :
Acoustic waves; Argon; Biosensors; Bulk acoustic wave devices; Film bulk acoustic resonators; Piezoelectric films; Sputtering; Substrates; Surface acoustic waves; Zinc oxide;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 2005 IEEE
ISSN :
1051-0117
Print_ISBN :
0-7803-9382-1
Type :
conf
DOI :
10.1109/ULTSYM.2005.1602831
Filename :
1602831
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=452639
