DocumentCode
452640
Title
Volume manufacturing aspects of baw filters on a production cluster system
Author
Lanz, Roman ; Lambert, Christian
Volume
1
fYear
2005
fDate
18-21 Sept. 2005
Firstpage
210
Lastpage
214
Keywords
Acoustic reflection; Bulk acoustic wave devices; Electrodes; Filters; Frequency; Manufacturing processes; Optical films; Piezoelectric films; Production systems; Sputtering;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 2005 IEEE
ISSN
1051-0117
Print_ISBN
0-7803-9382-1
Type
conf
DOI
10.1109/ULTSYM.2005.1602833
Filename
1602833
Link To Document