DocumentCode :
452641
Title :
Improving manufacturability of aln deposition used in making bulk acoustic wave devices
Author :
Mishin, S. ; Sylvia, B. ; Marx, D.R.
Volume :
1
fYear :
2005
fDate :
18-21 Sept. 2005
Firstpage :
215
Lastpage :
218
Keywords :
Bulk acoustic wave devices; Film bulk acoustic resonators; Filters; Magnetic materials; Manufacturing; Piezoelectric films; Production; Sputtering; Stress control; Testing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 2005 IEEE
ISSN :
1051-0117
Print_ISBN :
0-7803-9382-1
Type :
conf
DOI :
10.1109/ULTSYM.2005.1602834
Filename :
1602834
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=452641
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