Title :
Design and testing of rotors for a cylindrical micro-machined micro ultrasonic motor
Author :
Kanda, T. ; Oomori, Y. ; Makino, A. ; Suzumori, K. ; Kobayashi, A.
Keywords :
Ceramics; Electrodes; Engine cylinders; Glass; Micromotors; Piezoelectric materials; Piezoelectric transducers; Rotors; Stators; Testing;
Conference_Titel :
Ultrasonics Symposium, 2005 IEEE
Print_ISBN :
0-7803-9382-1
DOI :
10.1109/ULTSYM.2005.1602855
