Title :
Friction drive dynamics of surface acoustic wave motor
Author :
Shigematsu, Takashi ; Kurosawa, Minoru Kuribayashi
Keywords :
Acoustic measurements; Acoustic waves; Displacement measurement; Drives; Friction; Lithium niobate; Mechanical variables measurement; Stators; Surface acoustic waves; Ultrasonic variables measurement;
Conference_Titel :
Ultrasonics Symposium, 2005 IEEE
Print_ISBN :
0-7803-9382-1
DOI :
10.1109/ULTSYM.2005.1602856