Title :
Evaluating ZnO thin film transducers by optical contact bonding of glass blocks
Author :
Hickernell, Fred S.
Keywords :
Glass; Optical films; Optical losses; Piezoelectric films; Piezoelectric transducers; Propagation losses; Sputtering; Ultrasonic transducers; Wafer bonding; Zinc oxide;
Conference_Titel :
Ultrasonics Symposium, 2005 IEEE
Print_ISBN :
0-7803-9382-1
DOI :
10.1109/ULTSYM.2005.1602860
