DocumentCode :
452662
Title :
Shear mode coupling and tilted grain growth of A1N thin films in BAW resonators
Author :
Martin, F. ; Jan, M.-E. ; Rey-Mermet, S. ; Su, D. ; Muralt, P. ; Cantoni, M.
Volume :
1
fYear :
2005
fDate :
18-21 Sept. 2005
Firstpage :
333
Lastpage :
336
Keywords :
Dielectric substrates; Electrodes; Magnetic analysis; Magnetic flux; Permittivity; Piezoelectric films; Radio frequency; Scanning electron microscopy; Sputtering; Transistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 2005 IEEE
ISSN :
1051-0117
Print_ISBN :
0-7803-9382-1
Type :
conf
DOI :
10.1109/ULTSYM.2005.1602862
Filename :
1602862
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=452662
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