Title :
Low propagation loss of atomically-flat surface aln with low dislocation density for 5-ghz band saw devices
Author :
Uehara, K. ; Aota, Y. ; Kameda, S. ; Nakase, H. ; Tsubouchi, K.
Keywords :
Atomic layer deposition; Ducts; Hydrogen; Inductors; MOCVD; Propagation losses; Rough surfaces; Substrates; Surface acoustic wave devices; Surface roughness;
Conference_Titel :
Ultrasonics Symposium, 2005 IEEE
Print_ISBN :
0-7803-9382-1
DOI :
10.1109/ULTSYM.2005.1602891
