Title :
Design, modeling and fabrication of piezoelectric micromachined ultrasonic transducers
Author :
Belgacem, B. ; Calame, F. ; Muralt, P.
Keywords :
Acoustic beams; Analytical models; Biomembranes; Ceramics; Electrodes; Fabrication; Frequency; Laboratories; Resonance; Ultrasonic transducers;
Conference_Titel :
Ultrasonics Symposium, 2005 IEEE
Print_ISBN :
0-7803-9382-1
DOI :
10.1109/ULTSYM.2005.1602896
