DocumentCode
453043
Title
Non-destructive methods and devices for the inspection of key parameters of semiconductor materials
Author
Votoropin, S.D.
Volume
1
fYear
2005
fDate
4-7 Dec. 2005
Abstract
Diagnostics of semiconductor materials electrophysical parameters is a necessary part of the "know-how" both for semiconductor materials, and for various devices on their basis. The contactless, non-destroying quality monitoring is most suitable for these purposes for devices and installations.
Keywords
nondestructive testing; semiconductor materials; contactless nondestroying quality monitoring; electrophysical parameters; nondestructive methods; semiconductor materials; Apertures; Conductivity; Contact resistance; Electrical resistance measurement; Inspection; Magnetic field measurement; Microwave measurements; Probes; Pulse amplifiers; Semiconductor materials; diagnostics; electrophysical parameters; measuring approaches; measuring bench; semiconductor materials;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference Proceedings, 2005. APMC 2005. Asia-Pacific Conference Proceedings
Print_ISBN
0-7803-9433-X
Type
conf
DOI
10.1109/APMC.2005.1606329
Filename
1606329
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