DocumentCode
453090
Title
Physics based modeling and simulation of hetero material asymmetric gate stack epi (HEMAGASE)-MOSFET
Author
Gupta, R.S. ; Goel, Kirti ; Saxena, Manoj ; Gupta, Mridula
Author_Institution
Dept. of Electron. Sci., Delhi South Campus Univ., New Delhi, India
Volume
2
fYear
2005
fDate
4-7 Dec. 2005
Abstract
Two dimensional analytical modeling and simulation of a new device architecture-hetero material asymmetric gate stack epi (HEMAGASE) MOSFET is presented for short channel lengths. We have studied the various possible structures of asymmetric gate oxide stack MOSFET with heteromaterial gate and made a comparison between them. The model proposed is capable of modeling electrical characteristics like surface potential, electric field and threshold voltage. ATLAS, 2-D device simulator is used, over a wide range of parameters and bias conditions to validate the analytical results.
Keywords
MOSFET; semiconductor device models; 2D device simulator; ATLAS; HEMAGASE MOSFET; asymmetric gate oxide stack MOSFET; electrical characteristics; hetero material gate; heteromaterial asymmetric gate stack epi; short channel lengths; Analytical models; Boundary conditions; Doping; Electric potential; High K dielectric materials; High-K gate dielectrics; MOSFET circuits; Physics; Semiconductor process modeling; Substrates; ATLAS: device simulation software; Asymmetric Gate Stack; Hetero material gate;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference Proceedings, 2005. APMC 2005. Asia-Pacific Conference Proceedings
Print_ISBN
0-7803-9433-X
Type
conf
DOI
10.1109/APMC.2005.1606400
Filename
1606400
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