A micromechanical high-Q resonator based on hybrid cavity

Author

Wu, Pan ; Yu, Zhang

Author_Institution

Inst. of MOEMS, Chongqing Univ. of Posts & Telecommun., China

Volume

2

fYear

2005

fDate

4-7 Dec. 2005

Abstract

A micromechanical resonator with high quality factor and small size at 12.12 GHz has been designed and relevant measured data have been obtained. The dimensions of hybrid cavity structure filled in Rogers Duroid (ε_r=10.8) is 8.2mm×4.4mm×1mm. Electromagnetic energy is coupled into the cavity from input and output microstrip lines with characteristic impedance of 50 ohm via slots. The hybrid cavity resonator was fabricated by standard silicon micromachining process and bolding technique. Theoretical and measured resonance frequency of TE₁₀₁ mode is 12.12 GHz and 11.84 GHz respectively. The unloaded Q factor is 303. The errors between theoretical and measured results were analyzed.

Keywords

Q-factor; cavity resonators; micromachining; micromechanical resonators; microstrip lines; 1 mm; 11.84 GHz; 12.12 GHz; 4.4 mm; 8.2 mm; bolding technique; electromagnetic energy; hybrid cavity resonator; micromechanical high-Q resonator; microstrip lines; silicon micromachining process; Cavity resonators; Electromagnetic coupling; Electromagnetic measurements; Impedance; Micromachining; Micromechanical devices; Microstrip; Q factor; Silicon; Size measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference Proceedings, 2005. APMC 2005. Asia-Pacific Conference Proceedings

Print_ISBN

0-7803-9433-X

Type

conf

DOI

10.1109/APMC.2005.1606533

Filename

1606533