Title :
Microwave measurements of thickness and conductivity of nanometer metal-semiconductor structures
Author :
Abramov, A.V. ; Usanov, D.A. ; Skripal, A.V. ; Bogolyubov, A.S.
Author_Institution :
Saratov State Univ., Russia
Abstract :
Method for nondestructive multiparameter check of electrophysical parameters of nanometer metal-semiconductor structures using frequency dependence of reflectance and transmittance had been proposed and implemented experimentally.
Keywords :
electrical conductivity measurement; microwave measurement; semiconductor-metal boundaries; thickness measurement; conductivity measurement; electrophysical parameters; microwave measurements; nanometer metal-semiconductor structures; nondestructive multiparameter check; thickness measurement; Conductivity measurement; Electromagnetic scattering; Electromagnetic waveguides; Microwave measurements; Microwave theory and techniques; Nanostructures; Reflectivity; Semiconductor waveguides; Substrates; Thickness measurement;
Conference_Titel :
Microwave Conference, 2005 European
Print_ISBN :
2-9600551-2-8
DOI :
10.1109/EUMC.2005.1608905
