Title :
CPW on silicon substrates: propagation constant modeling and substrate free carriers contribution
Author :
Duraz, E. ; Ferrari, P. ; Duvillaret, L. ; Coutaz, J.-L. ; Duchamp, J.-M. ; Estebe, E. ; Ghesquiers, J.-P.
Abstract :
We present a mixed approach associating Drude´s and Heinrich´s models for the modelling of attenuation and dispersion of coplanar waveguides. We investigate both single- and multi-layered substrates for which our approach is in good agreement with measurements. In the case of single-layered substrates, no adjustable parameter is required and we validate the model for both high and low resistivity silicon substrates.
Keywords :
coplanar waveguides; electromagnetic wave propagation; elemental semiconductors; silicon; Si; coplanar waveguide; multilayered substrates; propagation constant modeling; silicon substrates; single-layered substrates; substrate free carriers contribution; Conductivity; Coplanar waveguides; Dielectric constant; Dielectric materials; Dielectric substrates; Electromagnetic modeling; Electromagnetic waveguides; Permittivity; Propagation constant; Silicon on insulator technology;
Conference_Titel :
Microwave Conference, 2005 European
Print_ISBN :
2-9600551-2-8
DOI :
10.1109/EUMC.2005.1610068
