Title :
High-level factory environment for process simulation: an open architecture
Author :
Bruno, Agatino ; Rinaudo, Salvatore ; Liotta, Salvatore Fabio ; Sciacca, Elio
Author_Institution :
ST Microelectron., Catania
Abstract :
In this work, we show a software able to collect all the required information for the process simulation of a semiconductor technology directly from the clean room equipments by using net CAM systems, and gives as output a script in the simulator software syntax, giving a useful verification and validation tool to process engineering
Keywords :
computer aided manufacturing; discrete event simulation; program verification; semiconductor device manufacture; high-level factory environment; net CAM system; process engineering; process simulation; semiconductor technology; simulator software syntax; validation tool; verification tool; Analytical models; CADCAM; Circuit simulation; Computational modeling; Computer aided manufacturing; Microelectronics; Production facilities; Silicon; Software tools; Solid modeling;
Conference_Titel :
Emerging Technologies and Factory Automation, 2005. ETFA 2005. 10th IEEE Conference on
Conference_Location :
Catania
Print_ISBN :
0-7803-9401-1
DOI :
10.1109/ETFA.2005.1612604
