Title :
Plasmonic Terahertz Waveguide Based on Anisotropically Etched Silicon Substrate
Author :
Shanshan Li ; Jadidi, Mohammad M. ; Murphy, Thomas E. ; Kumar, Girish
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Maryland, College Park, MD, USA
Abstract :
We experimentally examine anisotropically etched silicon surfaces for terahertz (THz) plasmonic guided wave applications. Highly doped silicon surfaces are anisotropically etched to form a one-dimensional array of subwavelength concave pyramidal troughs. The plasmonic wave guides are found to support highly confined guided modes both in transverse and longitudinal directions. The resonant frequencies of the modes can be controlled by adjusting the geometrical parameters of the troughs. The existence of guided modes in plasmonic wave guides is also established through finite-element-based numerical simulations. These wave guides could provide a silicon-based alternative to metallic wave guides for use in future THz devices.
Keywords :
elemental semiconductors; etching; finite element analysis; plasmonics; silicon; waveguides; Si; anisotropically etched silicon substrate; finite element based numerical simulations; geometrical parameters; metallic waveguides; plasmonic terahertz waveguide; subwavelength concave pyramidal troughs; Optical surface waves; Optical waveguides; Plasmons; Resonant frequency; Silicon; Surface waves; Anisotropic etching; plasmonics; subwavelength structures;
Journal_Title :
Terahertz Science and Technology, IEEE Transactions on
DOI :
10.1109/TTHZ.2014.2325739
