DocumentCode :
455546
Title :
The IET Seminar on MEMS Sensors & Actuators
fYear :
2006
fDate :
28-28 April 2006
Abstract :
The following topics are dealt with: MEMS sensors; actuiators; fluidics and flow; physical sensors; RF and wireless; actuators; and biochemical sensors.
Keywords :
actuators; chemical sensors; micromechanical devices; MEMS sensors; actuators; biochemical sensors; flow; fluidics; microelectromechanical sensors; radiofrequency;
fLanguage :
English
Publisher :
iet
Conference_Titel :
MEMS Sensors and Actuators, 2006. The Institution of Engineering and Technology Seminar on
Conference_Location :
London
ISSN :
0537-9989
Print_ISBN :
0-86341-627-6
Type :
conf
Filename :
1662164
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=455546
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