Bio-inspired MEMS Resonant Thermal Detector

Author

McNie, M.E. ; Combes, D.J. ; Davies, R.R. ; Brunson, K.M. ; Lewis, K.L. ; Hamilton, D.J. ; Mankondo, L. ; Anthony, C.J. ; Hill, C.A. ; Harris, Matthew W. ; Donohue, P.P. ; Todd, M.A.

Author_Institution

QinetiQ Ltd. (UK), Malvern

fYear

2006

fDate

28-28 April 2006

Firstpage

83

Lastpage

90

Abstract

There are many examples of creatures in the natural world with the ability to sense thermal radiation including pit vipers and fire-seeking beetles. This work has sought inspiration from sensors in the natural world and has investigated a disruptive MEMS-based technology with the potential to achieve high performance uncooled infra red detection at low cost. The novel transduction is based on individual resonant elements changing their frequency with temperature. Devices have been designed and post-processed on standard silicon CMOS substrates in a standard materials set. Measurements of thermal sensitivity are in good agreement with predictions and the device has the potential for 40-60 mK NETD performance.

Keywords

CMOS integrated circuits; bioMEMS; heat radiation; infrared detectors; CMOS substrate; NETD performance; Si; bio-inspired MEMS; infra red detection; resonant thermal detector; thermal radiation; thermal sensitivity;

fLanguage

English

Publisher

iet

Conference_Titel

MEMS Sensors and Actuators, 2006. The Institution of Engineering and Technology Seminar on

Conference_Location

London

ISSN

0537-9989

Print_ISBN

0-86341-627-6

Type

conf

Filename

1662179