A Wideband CPW-Fed Planar Dielectric Tapered Antenna With Parasitic Elements for 60-GHz Integrated Application

This paper presents a high-efficiency wideband planar dielectric tapered antenna designed for 60-GHz integrated applications fabricated through a novel process compatible with silicon technology. The antenna is composed of five parts: a CPW line, a balun, a tapered slot line, a dielectric tapered antenna, and parasitic elements. Single antenna has a simulated impedance bandwidth from 52.4 to 66.4 GHz, and a peak gain between 8.5 and 10.25 dBi over the bandwidth. Furthermore, a two-element array of this antenna is designed using a CPW power divider with a simulated 12-dBi gain and 9-GHz bandwidth. Single-element antenna and two-element array prototypes are fabricated on high-resistive bonded silicon wafers through a novel 11-step fabrication process designed for double-sided etching. The measured results of single antenna show over 15-GHz bandwidth and 9.6-dBi gain. For the two-element array measured, the bandwidth and gain are 10 GHz and 10.8 dBi, respectively. The antenna performance is suitable for integrated mm-wave applications requiring wide bandwidth, particularly mm-wave imaging.