Title :
High Index-Contrast Silicon-On-Insulator Nanophotonics
Author :
Bienstman, P. ; Van Laere, F. ; Taillaert, D. ; Dumon, P. ; Bogaerts, W. ; De Vos, Kristof ; Van Thourhout, Dries ; Baets, R.
Author_Institution :
Dept. of Inf. Technol., Ghent Univ.
Abstract :
We will present recent progress in several devices based on silicon-on-insulator nanophotonics using deep-UV lithography. We will report on high efficiency grating couplers, ultra-compact arrayed waveguide gratings and ring-resonator based biosensors
Keywords :
arrayed waveguide gratings; biological techniques; integrated optics; micro-optics; nanolithography; optical couplers; optical resonators; optical sensors; silicon-on-insulator; ultraviolet lithography; Si-SiO2; arrayed waveguide gratings; deep-ultraviolet lithography; grating couplers; high index-contrast nanophotonics; ring-resonator based biosensors; silicon-on-insulator nanophotonics; Arrayed waveguide gratings; Biosensors; Etching; Mirrors; Nanophotonics; Optical coupling; Optical fiber couplers; Optical ring resonators; Optical waveguides; Silicon on insulator technology; arrayed waveguide gratings; biosensors; nanophotonics; ring resonators;
Conference_Titel :
Transparent Optical Networks, 2006 International Conference on
Conference_Location :
Nottingham
Print_ISBN :
1-4244-0235-2
Electronic_ISBN :
1-4244-0236-0
DOI :
10.1109/ICTON.2006.248354
