Title :
Technology Route Towards Industrial Application of Rear Passivated Silicon Solar Cells
Author :
Rentsch, J. ; Schultz, O. ; Grohe, A. ; Biro, D. ; Preu, R. ; Willeke, G.P.
Author_Institution :
Fraunhofer Inst. for Solar Energy Syst., Freiburg
Abstract :
Going beyond the standard industrial screen-printed Al-BSF rear side, this paper reports about process technologies for an industrial implementation of a rear passivated, locally contacted multicrystalline (mc) silicon solar cell. The solar cells rear side features a passivation stack system and an evaporated and LFC contacted Al layer. Due to the need of processing thinner wafers, a technology survey focuses on the adaptation of mainly inline based technologies for the realization of an industrial process scheme. New inline process technologies are introduced and compared with standard technologies. Up to date, large area mc-Si solar cells (156times156 mm2) fabricated completely with these inline technologies reach fill factors up to 76%, on reference cells (125times125 mm2) an efficiency of 16% is reached with an untextured front surface
Keywords :
elemental semiconductors; evaporation; passivation; semiconductor device manufacture; silicon; solar cells; Si; evaporation; industrial process; industrial screen-printed Al-BSF rear side; inline process technology; laser-fired contact process; multicrystalline silicon solar cells; process technology; rear passivation; solar cells fabrication; thinner wafers process; Energy conversion; Furnaces; Manufacturing; Passivation; Photovoltaic cells; Photovoltaic systems; Plasma chemistry; Silicon; Solar power generation; Stress;
Conference_Titel :
Photovoltaic Energy Conversion, Conference Record of the 2006 IEEE 4th World Conference on
Conference_Location :
Waikoloa, HI
Print_ISBN :
1-4244-0017-1
Electronic_ISBN :
1-4244-0017-1
DOI :
10.1109/WCPEC.2006.279289
