DocumentCode
460207
Title
Industrial Challenges For Thin Wafer Manufacturing
Author
Wang, Per Arne
Author_Institution
REC Wafer
Volume
1
fYear
2006
fDate
38838
Firstpage
1179
Lastpage
1182
Abstract
Because of limited supply of Silicon, there has been an industry-driven requirement for reduction of material consumption per Wp of solar power. As a consequence, the thickness of wafers has been reduced, which in turn has introduced new challenges for the industry. During the wafer manufacturing cycle, the wafers are exposed to mechanical loads caused by sawing, manual handling, liquid jets, transport systems and pick and place equipment. The introduction of thinner wafers has reinforced the requirements for reducing these mechanical loads, in order not to increase the breakage and defect rates accordingly. The research has aimed at modeling and measuring the stresses on the wafers in the various process steps. This provides a tool for obtaining an optimal tuning of the process-parameters. In addition, this work is essential for providing specifications of better and more gentle wafer-handling technologies in the future
Keywords
elemental semiconductors; sawing; semiconductor device manufacture; silicon; stress measurement; liquid jets; manual handling; material consumption; mechanical loads; sawing; silicon; solar power; stress measurement; thin wafer manufacturing; transport systems; wafer-handling technology; Electricity supply industry; Equations; Manufacturing industries; Production; Sawing machines; Semiconductor device modeling; Silicon; Solar energy; Stress measurement; Surface cracks;
fLanguage
English
Publisher
ieee
Conference_Titel
Photovoltaic Energy Conversion, Conference Record of the 2006 IEEE 4th World Conference on
Conference_Location
Waikoloa, HI
Print_ISBN
1-4244-0017-1
Electronic_ISBN
1-4244-0017-1
Type
conf
DOI
10.1109/WCPEC.2006.279391
Filename
4059846
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