Single-Mode Oxide-Confined VCSEL for Printers and Sensors

Author

Otoma, H. ; Murakami, Akira ; Kuwata, Yoshiaki ; Ueki, N. ; Mukoyama, N. ; Kondo, Toshiaki ; Sakamoto, Akira ; Omori, Sho ; Nakayama, Hiroki ; Nakamura, T.

Author_Institution

Opt. Syst. Bus. Dev., Fuji Xerox Co. Ltd., Ebina

Volume

1

fYear

2006

fDate

5-7 Sept. 2006

Firstpage

80

Lastpage

85

Abstract

The 850nm single-mode oxide-confined VCSEL with a metal aperture as a spatial mode filter is reported. The OPTALO (optical probing technique for AlAs lateral oxidation) process was adopted to manufacture a small oxide aperture in VCSEL with high reproducibility. The combination of a metal-aperture and an oxide-aperture brought good performance to 850nm single-mode VCSEL. The fundamental transverse mode oscillation was obtained up to 4.7mW output power. The SMSR is larger than 27dB. No kinks in the L-I curves were observed under -40 to 95degC temperature range. The laser beam is selectively polarized in parallel to the lang0.1-1rang orientation of the GaAs substrate. We also developed the 780nm single-mode VCSEL array (8times4) for laser beam printer application. The polygon scanner system incorporating this 780nm single-mode VCSEL array made it possible to achieve 2400 DPI high dense printing together with 80ppm high speed print

Keywords

III-V semiconductors; aluminium compounds; gallium arsenide; laser printers; oxidation; sensors; spatial filters; surface emitting lasers; 780 nm; 850 nm; AlAs; AlAs lateral oxidation process; OPTALO; high dense printing; high speed print; laser beam printer; metal aperture; metal-aperture; optical probing technique; oxide aperture; polygon scanner system; sensors; single-mode VCSEL array; single-mode oxide-confined VCSEL; spatial mode filter; transverse mode oscillation; Apertures; High speed optical techniques; Laser beams; Manufacturing processes; Optical filters; Optical sensors; Oxidation; Printers; Reproducibility of results; Vertical cavity surface emitting lasers;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronics Systemintegration Technology Conference, 2006. 1st

Conference_Location

Dresden

Print_ISBN

1-4244-0552-1

Electronic_ISBN

1-4244-0553-x

Type

conf

DOI

10.1109/ESTC.2006.279982

Filename

4060706