Interconnections in Multilayer PCBs Based on Microvias Metallized by Magnetron Sputtering Deposition

The high advanced miniaturization of electronic components determines designers and producers of PCBs (printed circuit boards) to search the new constructions and technologies of HDI (high density interconnect) PCBs manufacturing. The researches are concentrated on the problems of miniaturization of PCBs interconnections. Many possibilities in this area are created by using microvia technology. The microvias can be made by using several techniques of drilling, but the great problem in this aspect is connected with possibilities of proper and repeatable metallization of microvias. Wide practical techniques of metallization allow to properly metallize of blind microvias which aspect ratio (deep/diameter of microvia) is about 1 or less. In the paper we propose the use of the magnetron sputtering deposition of copper to metallize the high aspect ratio blind microvias. During tests the use of magnetron self-sustaining mode also was investigated. This special mode allow to deposit of thin and very clear (without labour gas particles) electro-conductive layers which can be grown in electroplating processes