DocumentCode :
460315
Title :
Atom Force Microscopy of SnO2 Nano Layers
Author :
Filevskaya, L.N. ; Smyntyna, V.A. ; Grinevich, V.S.
Author_Institution :
Odessa Nat. I.I. Mcchnikov Univ.
Volume :
1
fYear :
2006
fDate :
27-29 Sept. 2006
Firstpage :
63
Lastpage :
66
Abstract :
The gas sensitivity applied problems solutions need a consideration and detailed investigation of the material´s electronic and ionic-subsystems ´ behavior. These systems´ behavior at their own turn is tightly connected with the structure and morphology of surfaces. The morphology investigations results are given for the SnO2layers obtained with the polymers usage
Keywords :
atomic force microscopy; nanostructured materials; tin compounds; SnO2; atomic force microscopy; nanostructured materials; Annealing; Atomic force microscopy; Atomic layer deposition; Nanostructured materials; Optical devices; Optical sensors; Polymer films; Substrates; Surface morphology; Tin;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
International Semiconductor Conference, 2006
Conference_Location :
Sinaia
Print_ISBN :
1-4244-0109-7
Type :
conf
DOI :
10.1109/SMICND.2006.283932
Filename :
4063159
Link To Document :
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