Mechanical Performances of an Integrate Micropump. Application in Electrophoresys

Due to the success of the Si technology in the micro electro mechanical systems MEMS - manufacturing, a lot of integrated micropumps were recently developed. The main structures don´t have movable parts, like input/output valves, because they can be easily destroyed during the operation. This paper presents an integrated pump with diffuser and nozzle ducts. The silicon membrane of micropump is actuated by a PZT layer, using the reverse piezoelectric effect. Coventor simulations confirm the micropump functionality. The entire MEMS structure could perform two roles: (1) ensures the liquid flow through the micropump chamber or (2) serves to separate the negative positive ions contained in a carrier bioliquid. Some simulations results aid to design the micropump for a possible application electrophoresis. However, the main aim of this paper was to simulate the mechanical stress produced by an electrical stimulus in a complex MEMS structure