• DocumentCode
    460338
  • Title

    Stress and Displacement in Cantilever-Based Transducers for Biosensing Application

  • Author

    Bineva, I. ; Voicu, R. ; Esinenco, D. ; Dinescu, A. ; Muller, R. ; Bucur, B. ; Diaconu, M. ; Radu, L.G.

  • Author_Institution
    INCD for Microtechnol., Bucharest
  • Volume
    1
  • fYear
    2006
  • fDate
    27-29 Sept. 2006
  • Firstpage
    223
  • Lastpage
    226
  • Abstract
    A cantilever array with dimensions of the beams 150times80times1.2 mum has been fabricated. Three different biochemical compounds were deposited and the cantilever was investigated using scanning electron microscopy (SEM). Simulations using CoventorWare have been made and stresses have been calculated between 12 and 60.4 MPa
  • Keywords
    biomedical transducers; biosensors; cantilevers; scanning electron microscopy; 1.2 micron; 150 micron; 80 micron; CoventorWare simulation; SEM; biochemical compounds; biosensing application; cantilever array; cantilever-based transducers; scanning electron microscopy; Atomic force microscopy; Biosensors; Etching; Fabrication; Gold; Micromechanical devices; Scanning electron microscopy; Stress; Structural beams; Transducers; MEMS; biosensing; cantilever; simulations; stress; transducers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    International Semiconductor Conference, 2006
  • Conference_Location
    Sinaia
  • Print_ISBN
    1-4244-0109-7
  • Type

    conf

  • DOI
    10.1109/SMICND.2006.283973
  • Filename
    4063200
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=460338