Title :
Stress and Displacement in Cantilever-Based Transducers for Biosensing Application
Author :
Bineva, I. ; Voicu, R. ; Esinenco, D. ; Dinescu, A. ; Muller, R. ; Bucur, B. ; Diaconu, M. ; Radu, L.G.
Author_Institution :
INCD for Microtechnol., Bucharest
Abstract :
A cantilever array with dimensions of the beams 150times80times1.2 mum has been fabricated. Three different biochemical compounds were deposited and the cantilever was investigated using scanning electron microscopy (SEM). Simulations using CoventorWare have been made and stresses have been calculated between 12 and 60.4 MPa
Keywords :
biomedical transducers; biosensors; cantilevers; scanning electron microscopy; 1.2 micron; 150 micron; 80 micron; CoventorWare simulation; SEM; biochemical compounds; biosensing application; cantilever array; cantilever-based transducers; scanning electron microscopy; Atomic force microscopy; Biosensors; Etching; Fabrication; Gold; Micromechanical devices; Scanning electron microscopy; Stress; Structural beams; Transducers; MEMS; biosensing; cantilever; simulations; stress; transducers;
Conference_Titel :
International Semiconductor Conference, 2006
Conference_Location :
Sinaia
Print_ISBN :
1-4244-0109-7
DOI :
10.1109/SMICND.2006.283973
