Title :
Advanced Magnetoresistance Sensing of Rotation Rate for Biomedical Applications
Author :
Avram, Marioara ; Volmer, Marius ; Avram, Andrei Marius ; Iliescu, Ciprian ; Bragaru, A.
Author_Institution :
National Inst. for Res. & Dev. in Microtechnologies, Bucharest
Abstract :
We propose the use of a magnetoresistive sensor with a non-contacting transduction mechanism to transform the rotor rotation rate into an electrical signal. The rotor is fabricated from polysilicon and coated with a soft magnetic material, such Permalloy, with an in-plane uniaxial magnetization. As the rotor turns, the field from this microscopic magnet modulates the resistance of a bar of a low coercitivity material such as Permalloy placed nearby, close to the rotor flanges. The change in resistivity provides an electrical signal with frequency proportional to the rotation rate, and hence the fluid velocity
Keywords :
biological fluid dynamics; biosensors; coercive force; magnetic sensors; magnetoresistance; magnetoresistive devices; rotors; soft magnetic materials; biomedical applications; electrical signal; in-plane uniaxial magnetization; low coercitivity material; magnetoresistance sensor; magnetoresistive sensor; microscopic magnet; noncontacting transduction mechanism; rotor rotation rate; soft magnetic material; Biosensors; Electric resistance; Immune system; Magnetic force microscopy; Magnetic materials; Magnetic modulators; Magnetic sensors; Magnetization; Magnetoresistance; Soft magnetic materials; Giant magnetoresistance (GMR); Magnetic detection; Position sensors;
Conference_Titel :
International Semiconductor Conference, 2006
Conference_Location :
Sinaia
Print_ISBN :
1-4244-0109-7
DOI :
10.1109/SMICND.2006.283975
