Simulation study of Robust H¿ Control system for the optical ultra¿precision vibration isolation system

The hybrid control technology of the active vibration isolation and the passive vibration isolation is presented to solve the uncertainty of the optical ultra - precision instrument vibration isolation system. The active vibration isolation exploits the theory of Robust H¿, which overcome the uncertainty of model and the disturbance, and make the control system restrain the nonlinearity of the model and the disturbance of the vibration. The simulation results prove that this method has shown good robustness and control precision in the vibration isolation of the optical ultra - precision instrument.