Design and Development of AC-coupled Single-sided Silicon Strip Sensor

Author

Kah, D.H. ; Bae, J.B. ; Hyun, H.J. ; Kang, H.D. ; Kim, H.J. ; Park, H. ; Park, J.M. ; Park, K.S.

Author_Institution

Basic Atomic Energy Res. Inst., Kyungpook Nat. Univ., Daegu

Volume

1

fYear

2006

fDate

Oct. 29 2006-Nov. 1 2006

Firstpage

451

Lastpage

454

Abstract

Semiconductor detectors, and in particular silicon detectors, have unique properties that make them very suitable for the detection of ionizing radiation. We reported the design and development processes of the DC-type double-sided silicon strip sensor in the 2005 Nuclear Science Symposium. In this meeting we present the design and development of the single-sided silicon strip sensor which has coupling capacitors and bias resistors. The silicon sensor concept, details of the sensor design and fabrication processes are presented and the measurement results of the electrical characteristics of the fabricated sensors are also reported.

Keywords

position sensitive particle detectors; silicon radiation detectors; AC-coupled single-sided silicon strip sensor; Si; bias resistors; coupling capacitors; fabrication processes; ionizing radiation detection; semiconductor detectors; sensor design; silicon detectors; Capacitive sensors; Ionizing radiation; Ionizing radiation sensors; Nuclear and plasma sciences; Process design; Radiation detectors; Semiconductor radiation detectors; Sensor phenomena and characterization; Silicon radiation detectors; Strips;

fLanguage

English

Publisher

ieee

Conference_Titel

Nuclear Science Symposium Conference Record, 2006. IEEE

Conference_Location

San Diego, CA

ISSN

1095-7863

Print_ISBN

1-4244-0560-2

Electronic_ISBN

1095-7863

Type

conf

DOI

10.1109/NSSMIC.2006.356195

Filename

4179034