Title :
Energy Input Regimes in the EUV Radiation Source Based on the Pseudospark Discharge
Author :
Korolev, Yu.D. ; Frants, O.B. ; Geyman, V.G. ; Ivashov, R.V. ; Landl, V.N. ; Shemyakin, I.A.
Author_Institution :
Inst. of High Current Electron., Tomsk
Abstract :
In this paper the regimes of energy input to pseudospark discharge plasma in various stages of its development and EUV radiation behavior are investigated. The data for different temporal discharge stages are presented. It was shown, that the main fraction of EUV radiation energy is generated in the superdense glow discharge phase and depend on the value of energy input in this stage. Influence of electric circuit parameters and hollow cathode configuration on conversion efficiency has been investigated. The ways of conversion efficiency value enhancing have been analyzed
Keywords :
glow discharges; sparks; EUV radiation source; conversion efficiency; electric circuit parameters; energy input; hollow cathode configuration; pseudospark discharge; superdense glow discharge phase; Anodes; Capacitors; Cathodes; Circuits; Electrodes; Elementary particle vacuum; Fault location; Plasma measurements; Ultraviolet sources; Voltage;
Conference_Titel :
Discharges and Electrical Insulation in Vacuum, 2006. ISDEIV '06. International Symposium on
Conference_Location :
Matsue
Print_ISBN :
1-4244-0191-7
Electronic_ISBN :
1093-2941
DOI :
10.1109/DEIV.2006.357237
