DocumentCode :
46291
Title :
Design and Characterization of a 2-DOF MEMS Ultrasonic Energy Harvester With Triangular Electrostatic Electrodes
Author :
Fowler, Anthony George ; Moheimani, S.O.R. ; Behrens, Sam
Author_Institution :
Sch. of Electr. Eng. & Comput. Sci., Univ. of Newcastle, Callaghan, NSW, Australia
Volume :
34
Issue :
11
fYear :
2013
fDate :
Nov. 2013
Firstpage :
1421
Lastpage :
1423
Abstract :
This letter presents a microelectromechanical systems (MEMS) based energy harvester designed for applications such as the powering of implanted biomedical devices. The harvester is mechanically excited by an external source of ultrasonic waves with triangular electrostatic electrodes being used to produce electrical power from the vibrations of the system´s proof mass. Comparisons are made with a previous MEMS harvester that uses conventional comb-finger electrostatic electrodes to demonstrate that the triangular electrodes result in a more effective conversion process. Experimental characterization shows that the device produces an average power output of 27.6 nW, which corresponds to a 29% increase in power output over the conventional comb-finger device.
Keywords :
electrodes; electrostatic devices; energy harvesting; micromechanical devices; ultrasonic devices; 2-DOF MEMS ultrasonic energy harvester; electrical power; microelectromechanical sys- tems; power 27.6 nW; system proof mass; triangular electrostatic electrodes; ultrasonic waves; vibrations; Acoustics; Capacitors; Electrodes; Electrostatics; Energy harvesting; Micromechanical devices; Vibrations; Electrostatic transducer; energy harvesting; energy scavenging; microelectromechanical systems (MEMS);
fLanguage :
English
Journal_Title :
Electron Device Letters, IEEE
Publisher :
ieee
ISSN :
0741-3106
Type :
jour
DOI :
10.1109/LED.2013.2282815
Filename :
6626666
Link To Document :
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