Title :
Mixing in a 220MHz CMOS-MEMS
Author :
López, J.L. ; Teva, J. ; Uranga, A. ; Torres, F. ; Verd, J. ; Abadal, G. ; Barniol, N. ; Esteve, J. ; Perez-Murano, F.
Author_Institution :
Departament d´´Enginyeria Electronica, Univ. Autonoma de Barcelona, Bellaterra
Abstract :
This paper describes the frequency mixing operation of a micro electro mechanical system device designed and fabricated in a CMOS commercial technology (AMS 0.35mum). The theory of the MEMS is summarized and a CMOS fully integrated MEMS is characterized as a mixer. The designed MEMS is a polysilicon clamped-clamped beam that presents a resonance frequency in the VHF range. CMOS-MEMS based mixer limitations are treated and a technique based on differential amplification to improve performance is given.
Keywords :
CMOS integrated circuits; amplification; micromechanical devices; mixers (circuits); 0.35 micron; CMOS commercial technology; CMOS-MEMS based mixer; CMOS-MEMS device; differential amplification; frequency mixing operation; microelectro mechanical system device; polysilicon clamped-clamped beam; Bridge circuits; CMOS technology; Capacitors; Chromium; Filters; Micromechanical devices; Radio frequency; Resonance; Resonant frequency; Voltage;
Conference_Titel :
Circuits and Systems, 2007. ISCAS 2007. IEEE International Symposium on
Conference_Location :
New Orleans, LA
Print_ISBN :
1-4244-0920-9
Electronic_ISBN :
1-4244-0921-7
DOI :
10.1109/ISCAS.2007.377953
