• DocumentCode
    465156
  • Title

    Voltage Elevator using a MEMS Resonator

  • Author

    Quero, José M.

  • Author_Institution
    Dept. of Electron. Eng., Seville Univ.
  • fYear
    2007
  • fDate
    27-30 May 2007
  • Firstpage
    3574
  • Lastpage
    3577
  • Abstract
    This paper proposes a new approach to realize a voltage elevator using a single MEMS capacitor with movable plates. This device works in resonant mode, and this feature allows for the use of low input voltage. Complete electrical and mechanical equivalent SIMULINK models have been designed. The simulation results provide full analysis of its complex chaotic behavior. Design criteria are deduced for a specific application.
  • Keywords
    capacitors; mathematics computing; micromechanical resonators; MEMS capacitor; MEMS resonator; SIMULINK models; complex chaotic behavior; voltage elevator; Actuators; Analytical models; Capacitors; Electronic circuits; Elevators; Low voltage; Micromechanical devices; Resonance; Springs; Switches;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Circuits and Systems, 2007. ISCAS 2007. IEEE International Symposium on
  • Conference_Location
    New Orleans, LA
  • Print_ISBN
    1-4244-0920-9
  • Electronic_ISBN
    1-4244-0921-7
  • Type

    conf

  • DOI
    10.1109/ISCAS.2007.378455
  • Filename
    4253453