Title :
Dependence of GMR in Co/Cu Multilayers on Sputtering Conditions
Author :
Chen, Ci ; Sakashita, Y. ; Suzuki, Yuya ; Kato, Toshihiko ; Iwata, Satoru ; Tsunashima, Shigeru ; Sasaki, Kazuhiko ; Sugai, H.
Author_Institution :
Nagoya Univ., Nagoya
Abstract :
Magnetic properties of magnetic multilayers, such as Co/Cu and Tb/Co, deeply depend on sputtering conditions (S.S.P. Parkin et al., 1991),(S. Schumeusser et al., 1997). However, it is not clear that the relationship between plasma parameter of sputtering discharge, and interface structure and magnetic properties of the multilayers. In particular, the magnetoresistance (MR) ratio for Co/Cu multilayers is very sensitive to the interface structure. Therefore, MR effect in Co/Cu may be good measure for evaluating the interface structure of multilayers. In this report, dependence of magnetoresistance properties in Co/Cu multilayers on sputtering conditions was investigated by measuring energy and space distributions of Ar+ ions and metal atoms.
Keywords :
cobalt; copper; ferromagnetic materials; giant magnetoresistance; magnetic multilayers; sputter deposition; Co-Cu; Tb-Co; giant magnetoresistance; interface structure; magnetic multilayers; magnetic properties; mgnetic properties; plasma parameter; sputtering discharge; Atomic measurements; Energy measurement; Extraterrestrial measurements; Giant magnetoresistance; Magnetic multilayers; Magnetic properties; Nonhomogeneous media; Plasma measurements; Plasma properties; Sputtering;
Conference_Titel :
Magnetics Conference, 2006. INTERMAG 2006. IEEE International
Conference_Location :
San Diego, CA
Print_ISBN :
1-4244-1479-2
DOI :
10.1109/INTMAG.2006.374856
