DocumentCode

465428

Title

Deep Etching in Silicon Using a Laser Beam Delivered by a Water Jet

Author

Wood, David

Author_Institution

School of Engineering, Durham University

fYear

2007

fDate

25-25 April 2007

Firstpage

1

Lastpage

15

fLanguage

English

Publisher

iet

Conference_Titel

Micro Electro-Mechanical Systems, 2007. MEMS Technology. 2007 IET Seminar on

Conference_Location

London, UK

ISSN

0537-9989

Print_ISBN

978-0-86341-807-5

Type

conf

Filename

4266799