DocumentCode :
465430
Title :
Integration of IC technology with MEMS: Silicon+ technology for the future
Author :
Walton, A.J. ; Stevenson, J.T.M. ; Underwood, I. ; Terry, J.G. ; Smith, S. ; Parkes, W. ; Dunare, C. ; Lin, H. ; Li, Y. ; Henderson, R. ; Renshaw, D. ; Muir, K. ; Desmulliez, M. ; Flynn, D. ; MacIntosh, M.J. ; Holland, W.S. ; Murray, A.F. ; Tang, T.B. ; B
Author_Institution :
Institute of Integrated Systems, University of Edinburgh (IMNS), UK Astronomy Technology Centre and Heriot Watt, Edinburgh
fYear :
2007
fDate :
25-25 April 2007
Firstpage :
1
Lastpage :
11
fLanguage :
English
Publisher :
iet
Conference_Titel :
Micro Electro-Mechanical Systems, 2007. MEMS Technology. 2007 IET Seminar on
Conference_Location :
London, UK
ISSN :
0537-9989
Print_ISBN :
978-0-86341-807-5
Type :
conf
Filename :
4266802
Link To Document :
بازگشت