Title :
Micro-Anode Guided Electroplating (MAGE) Control System with Digital Imaging Enhancement
Author :
Jiang, S.B. ; Lee, D.L. ; Yeh, Z.L. ; Kao, P.F.
Abstract :
This article releases the details of the digital imaging enhancement for the micro-anode guided electroplating MAGE fabrication equipment. The control system architecture, the micro stepping architecture, the electroplating power source, the measurement system, the man machine interface, the control procedure and the digital imaging subsystem are described. The profile of the electroplating deposit during the initiation phase as monitored in real-time by the new imaging subsystem could verify the simulation prediction.
Keywords :
electroplating; image enhancement; production engineering computing; production equipment; user interfaces; control system architecture; digital imaging enhancement; electroplating power source; fabrication equipment; man machine interface; measurement system; micro stepping architecture; microanode guided electroplating control system; Anodes; Control systems; Digital control; Digital images; Electrodes; Fabrication; Monitoring; Open loop systems; Power measurement; Voltage control;
Conference_Titel :
Systems, Man and Cybernetics, 2006. SMC '06. IEEE International Conference on
Conference_Location :
Taipei
Print_ISBN :
1-4244-0099-6
Electronic_ISBN :
1-4244-0100-3
DOI :
10.1109/ICSMC.2006.384615
