RIT MEMS Fabrication Course; University Government Industry Microelectronics Symposium

Author

Pearson, Robert E. ; Fuller, Lynn F. ; Puchades, Ivan

Author_Institution

Rochester Inst. of Technol., Rochester

fYear

2006

fDate

25-28 June 2006

Firstpage

13

Lastpage

17

Abstract

This paper describes a simple, reliable; bulk micro- machined, micro-electro-mechanical system (MEMS) process flow for the fabrication of a wide variety of devices which has been implemented within the Microelectronic Engineering Department at the Rochester Institute of Technology. The fabrication and testing results for thermopiles, pressure sensors, micro-speakers, micro- pumps, accelerometers and inductors in a ten week fabrication course are reported.

Keywords

accelerometers; educational courses; engineering education; inductors; mechatronics; micromachining; micropumps; pressure sensors; thermopiles; MEMS fabrication course; MEMS process flow; Rochester Institute of Technology; accelerometers; bulk micromachining; inductors; microelectromechanical system; micropumps; microspeakers; pressure sensors; thermopiles; Bulk MEMS; fabrication; flow sensor; inductor; micro-pump; pressure sensor; thermopile;

fLanguage

English

Publisher

ieee

Conference_Titel

University/Government/Industry Microelectronics Symposium, 2006 16th Biennial

Conference_Location

San Jose, CA

ISSN

0749-6877

Print_ISBN

1-4244-0267-0

Type

conf

DOI

10.1109/UGIM.2006.4286346

Filename

4286346