Title :
RIT MEMS Fabrication Course; University Government Industry Microelectronics Symposium
Author :
Pearson, Robert E. ; Fuller, Lynn F. ; Puchades, Ivan
Author_Institution :
Rochester Inst. of Technol., Rochester
Abstract :
This paper describes a simple, reliable; bulk micro- machined, micro-electro-mechanical system (MEMS) process flow for the fabrication of a wide variety of devices which has been implemented within the Microelectronic Engineering Department at the Rochester Institute of Technology. The fabrication and testing results for thermopiles, pressure sensors, micro-speakers, micro- pumps, accelerometers and inductors in a ten week fabrication course are reported.
Keywords :
accelerometers; educational courses; engineering education; inductors; mechatronics; micromachining; micropumps; pressure sensors; thermopiles; MEMS fabrication course; MEMS process flow; Rochester Institute of Technology; accelerometers; bulk micromachining; inductors; microelectromechanical system; micropumps; microspeakers; pressure sensors; thermopiles; Bulk MEMS; fabrication; flow sensor; inductor; micro-pump; pressure sensor; thermopile;
Conference_Titel :
University/Government/Industry Microelectronics Symposium, 2006 16th Biennial
Conference_Location :
San Jose, CA
Print_ISBN :
1-4244-0267-0
DOI :
10.1109/UGIM.2006.4286346
