Advanced Studies into the Hermeticity of Micro-Electronic & Micro-Ordnance Devices

This paper presents the preliminary findings of research studies initiated due to hermeticity problems associated with micro-cavity hermetic devices, some of which have resulted in field failures. The technical shortcomings and even misapplication of hermeticity test procedures when used for small or zero-cavity device testing has been allowed to prevail with the resultant escape of non-hermetic devices into critical systems applications. The authors have decades of experience in the fields of hermetic device evaluation, and they have assembled this paper to couple some of IsoVac Engineerings seal-defect findings with fundamental research at the University of Idaho involving defective hermetic seals and gas flow studies. Both groups have initiated studies to reevaluate hermeticity test procedures and practices, and associate them with the scientific theory upon which they were assumed to have been originally developed. This paper attempts to show a need for an approach that can perhaps bridge the gap between industry and academia in a very critical field. There needs to be a strong effort to understand and use proper laboratory failure analysis; isolate and/or derive and correct the theory that applies; and initiate experimental studies to verify that theory. These studies need to then be incorporated into upgraded and credible specifications to replace those being misapplied.