DocumentCode
467417
Title
Nanoimprint Lithography for Optical Components
Author
Scarpa, Giuseppe ; Brunetti, Francesca ; Harrer, Stefan ; Lugli, Paolo
Author_Institution
Tech. Univ. of Munich, Munich
Volume
2
fYear
2007
fDate
1-5 July 2007
Firstpage
194
Lastpage
197
Abstract
Nanoimprint lithography (NIL) is a new technique for lithographic patterning of nanostructures, which has advantages of high resolution, high throughput and low cost. This technique is presenting great opportunities for innovation and discovery in many engineering and scientific areas, such as electronic, optoelectronic and magnetism. We will show how the combination of different NIL techniques can lead to the realization of optical components such as waveguide gratings, sub-wavelength gratings, wavelength filters and photonic crystals, which in turn can lead to the design of optical devices with enhanced performance.
Keywords
diffraction gratings; nanolithography; nanostructured materials; optical elements; optical fabrication; photonic crystals; lithographic patterning; nanoimprint lithography; nanostructures; optical components; photonic crystals; sub-wavelength gratings; waveguide gratings; wavelength filters; Costs; Gratings; Magnetic separation; Nanolithography; Nanostructures; Optical devices; Optical waveguide components; Optical waveguides; Technological innovation; Throughput; nanofabrication; nanoimprint lithography; optical devices; sub-wavelength gratings; waveguide gratings;
fLanguage
English
Publisher
ieee
Conference_Titel
Transparent Optical Networks, 2007. ICTON '07. 9th International Conference on
Conference_Location
Rome
Print_ISBN
1-4244-1249-8
Electronic_ISBN
1-4244-1249-8
Type
conf
DOI
10.1109/ICTON.2007.4296178
Filename
4296178
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