• DocumentCode
    467417
  • Title

    Nanoimprint Lithography for Optical Components

  • Author

    Scarpa, Giuseppe ; Brunetti, Francesca ; Harrer, Stefan ; Lugli, Paolo

  • Author_Institution
    Tech. Univ. of Munich, Munich
  • Volume
    2
  • fYear
    2007
  • fDate
    1-5 July 2007
  • Firstpage
    194
  • Lastpage
    197
  • Abstract
    Nanoimprint lithography (NIL) is a new technique for lithographic patterning of nanostructures, which has advantages of high resolution, high throughput and low cost. This technique is presenting great opportunities for innovation and discovery in many engineering and scientific areas, such as electronic, optoelectronic and magnetism. We will show how the combination of different NIL techniques can lead to the realization of optical components such as waveguide gratings, sub-wavelength gratings, wavelength filters and photonic crystals, which in turn can lead to the design of optical devices with enhanced performance.
  • Keywords
    diffraction gratings; nanolithography; nanostructured materials; optical elements; optical fabrication; photonic crystals; lithographic patterning; nanoimprint lithography; nanostructures; optical components; photonic crystals; sub-wavelength gratings; waveguide gratings; wavelength filters; Costs; Gratings; Magnetic separation; Nanolithography; Nanostructures; Optical devices; Optical waveguide components; Optical waveguides; Technological innovation; Throughput; nanofabrication; nanoimprint lithography; optical devices; sub-wavelength gratings; waveguide gratings;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Transparent Optical Networks, 2007. ICTON '07. 9th International Conference on
  • Conference_Location
    Rome
  • Print_ISBN
    1-4244-1249-8
  • Electronic_ISBN
    1-4244-1249-8
  • Type

    conf

  • DOI
    10.1109/ICTON.2007.4296178
  • Filename
    4296178