Title :
Gauges for Definition of Oxygene Permeability of Protective Films for Surfaces of Microelectronic Devices
Author :
Domantsevich, Nina ; Yatsyshin, Bogdan ; Aksimentyeva, Olena
Author_Institution :
Lviv Commertial Acad., Lviv
fDate :
Feb. 28 2006-March 4 2006
Abstract :
The methods and results of the definition of gas permeability of protective polymer films on the surface of microelectronic devices has been described. It found that improving of protection is observed at low content of modification components in the polymer composition.
Keywords :
gauges; integrated circuits; permeability; polymer films; protective coatings; gas permeability; gauges; microelectronic devices; oxygene permeability; polymer composition; protective films; protective polymer films; Aging; Corrosion; Crystallization; Inhibitors; Microelectronics; Permeability; Plastic films; Polyethylene; Polymer films; Protection; gauges; oxygene permeability; protective films;
Conference_Titel :
Modern Problems of Radio Engineering, Telecommunications, and Computer Science, 2006. TCSET 2006. International Conference
Conference_Location :
Lviv-Slavsko
Print_ISBN :
966-553-507-2
DOI :
10.1109/TCSET.2006.4404681
