DocumentCode
468064
Title
Gauges for Definition of Oxygene Permeability of Protective Films for Surfaces of Microelectronic Devices
Author
Domantsevich, Nina ; Yatsyshin, Bogdan ; Aksimentyeva, Olena
Author_Institution
Lviv Commertial Acad., Lviv
fYear
2006
fDate
Feb. 28 2006-March 4 2006
Firstpage
672
Lastpage
672
Abstract
The methods and results of the definition of gas permeability of protective polymer films on the surface of microelectronic devices has been described. It found that improving of protection is observed at low content of modification components in the polymer composition.
Keywords
gauges; integrated circuits; permeability; polymer films; protective coatings; gas permeability; gauges; microelectronic devices; oxygene permeability; polymer composition; protective films; protective polymer films; Aging; Corrosion; Crystallization; Inhibitors; Microelectronics; Permeability; Plastic films; Polyethylene; Polymer films; Protection; gauges; oxygene permeability; protective films;
fLanguage
English
Publisher
ieee
Conference_Titel
Modern Problems of Radio Engineering, Telecommunications, and Computer Science, 2006. TCSET 2006. International Conference
Conference_Location
Lviv-Slavsko
Print_ISBN
966-553-507-2
Type
conf
DOI
10.1109/TCSET.2006.4404681
Filename
4404681
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